Research Facilities

The I2MS is an interdisciplinary research team spanning multiple departments within the School of Engineering and the School of Science, such that various research activities pertaining to micro & nano systems at HKUST can be effectively and efficiently linked together. These departments includes: Department of Mechanical Engineering, Department of Electrical & Electronic Engineering, Department of Chemical Engineering, Department of Industrial Engineering and Engineering Management, Department of Biology, Department of Biochemistry, Department of Physics, Department of Chemistry and Department of Mathematics. The facilities involved in the institute are as follows:

• Mask making capabilities (E-beams, LDW)

• Mask aligners (photolithography)

• LPCVD stacks (film deposition and deffusion)

• Wet etching benches and dry etchers, DRIE (film and substrate etching)

• Sputtering machines (metallic film formation)

• Ion implanter (doping)

• Automic force microsopy

• Dynamic Mechnical Analyzer (DMA) in MCPF

• EPack Lab

• ME-Solid / Materials Labs

• Sensor Lab (EEE)